Thin films of In2O3/SiO for Humidity Sensing Applications
نویسندگان
چکیده
منابع مشابه
Thin films of In2O3/SiO for Humidity Sensing Applications
This paper documents the manufacture and testing of a humidity sensor based on a combination of In2O3/SiO. A number of different sensor samples have been produced by thermal deposition and the effect of varying the vacuum pressure has also been investigated. The AC and DC conduction mechanisms have been investigated. From the AC conduction studies, the tunneling conduction mechanism has been ob...
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ژورنال
عنوان ژورنال: Sensors
سال: 2002
ISSN: 1424-8220
DOI: 10.3390/s20600205